Our sputtering device power supply offers rapid control response when generating arcs, and features stable output characteristics (30 W–300 kW), in addition to being highly reliable. Through painstaking thermal design, we've realized a more compact product.
Production of film for materials in semiconductor processes, PV battery panels, organic electro-luminescence, LCDs, and PDPs
Can also handle a large capacity load via master-slave operations. Higher input harmonics are reduced with an onboard power factor improvement circuit (PFC).
Employing the multistage inverter method, extremely low arc energy can be achieved.
'- Production of film for materials in semiconductor processes - Production of film for PV battery panels, organic electro-luminescence, LCDs, and PDPs
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